S530 parameter test system product line performance in several aspects. These performance improvements include the addition of Keithley's new high-throughput switch masters for high-integrity signal switching, full Kelvin measurements on probe cards to improve low-resistance accuracy, and new hardware protection modules to prevent high-sensitivity system instruments Affected by high voltage, as well as a full range of "detection" system specifications and diagnostic tools.
The S530 system is specifically optimized for production parametric test environments that must adapt to various product combinations or are critical in wide application flexibility and rapid development of test scenarios. The S530 tester uses proven source-measurement technology and high-fidelity signal paths to ensure industry-leading measurement accuracy and repeatability.
Choose two powerful parametric test configurations Two different configurations of the S530 system are available: Low-current configurations for characteristic measurements, such as sub-threshold leakage, gate leakage, etc.; High-voltage configurations for GaN, SiC, and Si LDMOS power devices More difficult faults and leakage tests are needed. The S530 low current system (2 to 8 SMU channels) provides sub-picoampere measurement resolution and low current protection all the way to the probe pins. The S530 high voltage system (3 to 7 SMU channels) has a source-measure unit (SMU) capable of outputting 1,000V @ 20mA (20W maximum). With proper configuration, the S530 system can implement all DC and CV measurement applications needed for process control monitoring, process reliability monitoring, and device characterization.
Optimized for Cost-Effective Operations Optimized for Highly Mixed Test Environments Throughout the test scenario development process, the S530 parametric test system provides timely feedback to engineers, accelerating and simplifying wafer and test setups. For example, the Automatic Characterization Suite (ACS) software developed to control the S530 system pipeline test program supports new test scripts for interactive testing and does not affect throughput in the fully automatic mode. ACS also provides off-line test program development and analysis of test results.
Powerful ACS Software Like other mature Keithley test systems, the S530 system also uses the powerful ACS 4.3 software, which strengthens the lab's connection with the round and accelerates system learning. Since the ACS combines all the elements needed for automatic parameter testing in one integrated package, it maximizes the efficiency and flexibility of the S530 system.
Industry's Most Powerful High-Voltage Parametric Test System All S530 systems are equipped with up to 20W source or sink capability (at 200V and 20V ranges) high-power SMUs for today's popular high power devices and circuits in mobile devices Complete feature analysis. Whether in LDMOS Si testing or in GaN BJT test applications, higher power performance provides deeper insight into device performance. It also ensures that the S530 system will not affect the low-current sub-pico-amp sensitivity required to monitor mainstream device processes when testing high-power devices. The S530 high voltage system is the only parametric tester that can provide 1kV to any probe card pin (up to 32 pins). It can perform sensitive measurements of high voltage and low current at a time, enabling accurate analysis of high-power devices. The high voltage SMU of this system can output 1,000V @ 20mA (20W maximum).
High Fidelity Signal Paths Improve Measurement Integrity Each S530 test system uses a high-performance switch matrix and a high-fidelity signal path to transmit signals directly between the instrument and test pins. By setting the upper current and voltage limits and limiting the low level measurement of the current offset, the performance of these paths will directly affect the overall performance of the test system. The S530 has 8 high-fidelity paths that can be used to dynamically connect instruments and pins. For example, up to eight SMUs can be connected to any pin (or group of pins) at a time. The low current system has consistent performance for all eight paths; the high voltage system has two high voltage/low leakage paths, four common paths, and two CV paths. Both systems support CV measurements up to 2MHz.
Based on proven SMU technology The S530 parametric test system is built with all of the source-measure units (SMUs) based on Keithley's product quality assurance instrumentation technology to ensure high measurement accuracy and repeatability and extend hardware life. These SMUs are four-quadrant sources that can output or sink (source or sink) current or voltage. In addition to precision source circuits, these SMUs also include a full-scale programmable range (tolerance) that helps prevent device damage and probe tip damage due to equipment failure. Each SMU can also measure voltage and current at the same time as the source, which ensures that the parameter calculation reflects the actual situation rather than the set conditions.
Capacitor-Voltage (CV) Unit Options All S530 systems can be equipped with a high-speed capacitance meter for CV measurements up to 2 MHz on any pin. This CV cell can measure 10 pF capacitance at 1 MHz and has 3% accuracy.
Product Quality Guarantee Function The S530 parameter test system includes a wealth of product quality assurance features, including built-in diagnostics, system metrics to probe cards, and compatibility with industry standards such as CE, SemiS2, and S8. The ACS "Instruction Bus" control interface simplifies the optional custom user interface or factory automation host controller.
The S530 system is specifically optimized for production parametric test environments that must adapt to various product combinations or are critical in wide application flexibility and rapid development of test scenarios. The S530 tester uses proven source-measurement technology and high-fidelity signal paths to ensure industry-leading measurement accuracy and repeatability.
Choose two powerful parametric test configurations Two different configurations of the S530 system are available: Low-current configurations for characteristic measurements, such as sub-threshold leakage, gate leakage, etc.; High-voltage configurations for GaN, SiC, and Si LDMOS power devices More difficult faults and leakage tests are needed. The S530 low current system (2 to 8 SMU channels) provides sub-picoampere measurement resolution and low current protection all the way to the probe pins. The S530 high voltage system (3 to 7 SMU channels) has a source-measure unit (SMU) capable of outputting 1,000V @ 20mA (20W maximum). With proper configuration, the S530 system can implement all DC and CV measurement applications needed for process control monitoring, process reliability monitoring, and device characterization.
Optimized for Cost-Effective Operations Optimized for Highly Mixed Test Environments Throughout the test scenario development process, the S530 parametric test system provides timely feedback to engineers, accelerating and simplifying wafer and test setups. For example, the Automatic Characterization Suite (ACS) software developed to control the S530 system pipeline test program supports new test scripts for interactive testing and does not affect throughput in the fully automatic mode. ACS also provides off-line test program development and analysis of test results.
Powerful ACS Software Like other mature Keithley test systems, the S530 system also uses the powerful ACS 4.3 software, which strengthens the lab's connection with the round and accelerates system learning. Since the ACS combines all the elements needed for automatic parameter testing in one integrated package, it maximizes the efficiency and flexibility of the S530 system.
Industry's Most Powerful High-Voltage Parametric Test System All S530 systems are equipped with up to 20W source or sink capability (at 200V and 20V ranges) high-power SMUs for today's popular high power devices and circuits in mobile devices Complete feature analysis. Whether in LDMOS Si testing or in GaN BJT test applications, higher power performance provides deeper insight into device performance. It also ensures that the S530 system will not affect the low-current sub-pico-amp sensitivity required to monitor mainstream device processes when testing high-power devices. The S530 high voltage system is the only parametric tester that can provide 1kV to any probe card pin (up to 32 pins). It can perform sensitive measurements of high voltage and low current at a time, enabling accurate analysis of high-power devices. The high voltage SMU of this system can output 1,000V @ 20mA (20W maximum).
High Fidelity Signal Paths Improve Measurement Integrity Each S530 test system uses a high-performance switch matrix and a high-fidelity signal path to transmit signals directly between the instrument and test pins. By setting the upper current and voltage limits and limiting the low level measurement of the current offset, the performance of these paths will directly affect the overall performance of the test system. The S530 has 8 high-fidelity paths that can be used to dynamically connect instruments and pins. For example, up to eight SMUs can be connected to any pin (or group of pins) at a time. The low current system has consistent performance for all eight paths; the high voltage system has two high voltage/low leakage paths, four common paths, and two CV paths. Both systems support CV measurements up to 2MHz.
Based on proven SMU technology The S530 parametric test system is built with all of the source-measure units (SMUs) based on Keithley's product quality assurance instrumentation technology to ensure high measurement accuracy and repeatability and extend hardware life. These SMUs are four-quadrant sources that can output or sink (source or sink) current or voltage. In addition to precision source circuits, these SMUs also include a full-scale programmable range (tolerance) that helps prevent device damage and probe tip damage due to equipment failure. Each SMU can also measure voltage and current at the same time as the source, which ensures that the parameter calculation reflects the actual situation rather than the set conditions.
Capacitor-Voltage (CV) Unit Options All S530 systems can be equipped with a high-speed capacitance meter for CV measurements up to 2 MHz on any pin. This CV cell can measure 10 pF capacitance at 1 MHz and has 3% accuracy.
Product Quality Guarantee Function The S530 parameter test system includes a wealth of product quality assurance features, including built-in diagnostics, system metrics to probe cards, and compatibility with industry standards such as CE, SemiS2, and S8. The ACS "Instruction Bus" control interface simplifies the optional custom user interface or factory automation host controller.
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