Shanghai Science and Technology Commission scientific instrument method research and research project passed the acceptance

[ Instrument Network Instrument Development ] July 31, 2019, Shanghai Science and Technology Commission Scientific Instrument Method Research and Research Project "Scanning Electron Microscope and Spectrometer Non-destructive Testing Micro-nano-scale Metal Plating Thickness Sharing Operation Method and Application Research" (Project No.) 16142202500) The acceptance meeting was held at the Shanghai Metrology Institute. The participating experts listened to the report of the project team and reviewed the acceptance data provided by the project team. After questioning and discussion, the expert group believed that the project team completed the research content specified in the project task book, reached the evaluation index, and agreed to pass the acceptance.

The project is based on micro-nano-scale gold (Au) coating and rhodium (Rh) coating material. The scanning electron microscopy and energy spectrometer and Monte Carlo simulation are used to establish the energy spectrum test results and the X-ray depth distribution curve of the elemental features. Relationship between. The difference between the coating thickness energy spectrum measurement result and the scanning electron microscope measurement result is not more than ±10%, and provides a common precious metal plating thickness analysis range.

Scanning electron microscope and spectrometer non-destructive testing of micro-nano-scale metal plating thickness shared by the project avoids the disadvantages of traditional micro-nano metal-scale coating thickness testing, and can quickly, accurately and non-destructively analyze the thickness of precious metal coating. China's integrated circuit, precious metal jewelry and other industries provide technical basis for the development.

Searched by the Shanghai Science and Technology New Search Center of the Chinese Academy of Sciences, the project is novel and the comprehensive technology has reached the international advanced level.

(Original title: "Scanning electron microscope and spectrometer non-destructive testing micro-nano-scale metal plating thickness sharing supporting operation method and application research" project passed the acceptance)